A micro machined accelerometer base

A micro machined accelerometer based on an
area variation capacitive sensing for more applications was
developed, in this case, we will describe and improve in
this work the efficacity as well as the sensitivity of a
capacitive accelerometer based on an area of variation
capacitive sensing considered as a micro system electro
mechanical (MEMS) available and realizable. However,
the simulation was performed using MATLAB as software
used in complicated situation with an optimization of the
several parameters of accelerometer and a single direction,
which is consisted with mobile fingers and fixed fingers, as
two springs which ensures the damping of the system. The
general concept, main design considerations and performance
of the resulted accelerometer was optimized and
elaborated in order to obtain a good improvement.

Kết quả (Anh) 1:

A micro machined accelerometer based on anarea variation capacitive sensing for more applications wasdeveloped, in this case, we will describe and improve printThis work the efficacity as well as the sensitivity of acapacitive accelerometer based on an area of variationcapacitive sensing considered as a micro system electromechanical (MEMS) available and realizable. However,the simulation was performed using MATLAB as softwareused in complicated situation with an optimization of theseveral parameters of accelerometer and a single direction, thewhich is consisted with mobile fingers and fixed fingers, astwo springs which ensures the damping of the system. Thegeneral concept, main design considerations and performanceof the accelerometer that resulted was optimized andelaborated in order to obtain a good improvement.

Kết quả (Anh) 2:

A micro-machined accelerometer based on an
area variation capacitive sensing applications was for more
Developed, in this case, and Improve We will describe in
this work as well as the efficacity the sensitivity of a
capacitive accelerometer based on an area of variation
Considered as capacitive sensing a microphone system electro
mechanical (MEMS) available and realizable. Tuy nhiên,
the simulation using MATLAB Performed as software was
used in complicated situation with an optimization of the
parameters of accelerometer vài and a single direction,
with mobile mà consisted fixed fingers and fingers, as
two springs mà ensures the damping of the system. The
general concept, main design and performance Considerations
of the accelerometer was resulted optimized and
elaborated in order to lấy a good improvement.